Japan, Aug. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'TEMPERATURE ESTIMATION DEVICE, PLASMA PROCESSING SYSTEM, TEMPERATURE ESTIMATION METHOD, AND TEMPERATURE ESTIMATION PROGRAM.' Other related details are as follows:
Application Number: JP,2025-105247
Category (FI): H10P50/20,101@G,G05B23/02@R,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 23, 2025
Publication Date: Sept. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....