Japan, March 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE TREATMENT DEVICE.' Other related details are as follows:
Application Number: JP,2022-048786
Category (FI): H01L21/304,648@D,B65G49/07@E,H01L21/306@J,H10P50/60@J,H10P70/00,102@A,H10P70/00,108@A,H10P70/00,108@D,H10P72/30@A,H01L21/304,642@A,H01L21/68@A,H01L21/304,648@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 24, 2022
Publication Date: Oct. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....