Japan, March 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE TREATING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-151708

Category (FI): H10P70/00,201@N,H10P70/00,108@A,H01L21/304,651@B,H01L21/304,648@A,H01L21/304,643@A,H01L21/304,642@A,H01L21/68@A,H10P72/30@A,H10P70/00,201@Z,H10P70/00,201@B,H10P70/00,103@A,H10P70/00,102@A,H01L21/304,651@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 22, 2022

Publication Date: April 3, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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