Japan Intellectual Property Rights: SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBSTRATE TREATMENT APPARATUS

Japan, July 27 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBSTRATE TREATMENT APPARATUS.' Other related details are as follows:

Application Number: JP,2022-160497

Category (FI): B24B57/02,B24B37/32@Z,B24B37/30@A,H10P52/00@L,H10P52/00@T,H10P52/40,H10P72/70,B24B55/06,H01L21/304,622@H,B24B37/10,H01L21/68@N

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 4, 2022

Publication Date: April 20, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....