Japan, May 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD.' Other related details are as follows:

Application Number: JP,2022-034267

Category (FI): B25J13/00@Z,B65G49/00@C,B65G49/07@D,B65G54/02,H01L21/68@A,H10P72/30@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 7, 2022

Publication Date: Sept. 20, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....