Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

Japan, July 14 -- CANON INC has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-097321

Category (FI): G03F9/00@H,G03F7/20,521,H01L21/68@G,H10P72/50@G

Stage: PROBLEM TO BE SOLVED: To provide a substrate processing system capable of reducing the time required for alignment.SOLUTION: The substrate processing system is for processing a plurality of substrates including a first substrate and a second substrate. The substrate processing system has a first alignment unit for aligning the substrates and a second alignment unit for aligning the substrates prior to the alignment by the first alignment unit. The second alignment uni...