Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE, RECIPE GENERATION DEVICE, SUBSTRATE PROCESSING METHOD, AND RECIPE GENERATION METHOD

Japan, July 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE, RECIPE GENERATION DEVICE, SUBSTRATE PROCESSING METHOD, AND RECIPE GENERATION METHOD.' Other related details are as follows:

Application Number: JP,2022-149356

Category (FI): G01N21/956@A,G03F7/20,521,G03F7/20,501

Stage: PROBLEM TO BE SOLVED: To provide a substrate processing device with which it is possible to efficiently inspect a plurality of substrates without requiring complicated work for generating an inspection recipe.SOLUTION: A mask identifier for identifying the photomask that is used in exposure processing is correlated to a substrate for which predetermined accompanying processing that a...