Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-183329

Category (FI): H10P70/00,201@Z,H10P70/00,201@N,H10P70/00,201@L,H10P70/00,108@A,H10P70/00,103@A,H01L21/304,651@L,H01L21/304,648@A,H01L21/304,643@A,H01L21/304,651@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 16, 2022

Publication Date: May 28, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....