Japan, Nov. 12 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-134829

Category (FI): H10P50/64@A,H01L21/308@D

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 26, 2022

Publication Date: March 7, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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