Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, July 27 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2021-211169

Category (FI): B24B7/04@Z,H10P70/00,108@A,H01L21/304,622@R,H10P70/00,108@G,H01L21/304,648@G,H01L21/304,644@A,H10P52/00@T,H10P52/00@U,H10P70/00,104@A,H01L21/304,648@A,H10P52/00@G,B24B41/06@L,B24B49/10

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 24, 2021

Publication Date: July 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....