Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, July 27 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-013472

Category (FI): H01L21/304,651@M,H01L21/304,644@G,H01L21/304,647@Z,H01L21/304,647@A,H01L21/304,648@A,H01L21/304,651@B,H01L21/304,644@B,H01L21/304,622@C,H01L21/304,622@F,H01L21/304,622@Q,G03F7/20,521,H10P52/00@D,H10P52/00@G,H10P52/00@T,H10P70/00,104@B,H10P70/00,104@G,H10P70/00,107@A,H10P70/00,107@Z,H10P70/00,108@A,H10P70/00,201@B,H10P70/00,201@M

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 31, 2022

Publication Date: Aug. 10, 2023

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