Japan, April 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-091774
Category (FI): H01L21/318@A,H01L21/31@E,H10P14/694@A,H10P14/60,101@E,H01L21/322@Z,H10P95/40@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 6, 2022
Publication Date: Dec. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....