Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD, PROGRAM AND SUBSTRATE PROCESSING APPARATUS

Japan, Sept. 14 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD, PROGRAM AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-120838

Category (FI): H01L21/02@Z,H10P76/00,568,H01L21/30,562,H10P76/00,562,H10P95/00,201@Z,H01L21/30,568

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 28, 2022

Publication Date: Feb. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....