Japan, June 10 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD, PROGRAM, SUBSTRATE PROCESSING DEVICE, AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE.' Other related details are as follows:
Application Number: JP,2024-221699
Category (FI): H01L21/285@C,H10P14/43,C23C16/34,C23C16/08
Stage: Grant (IP right document published.)
Filing Date: Dec. 18, 2024
Publication Date: Feb. 28, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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