Japan, Sept. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING EQUIPMENT, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-034492

Category (FI): H01L21/31@B,C23C16/46,H10P14/60,101@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 7, 2023

Publication Date: Sept. 20, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....