Japan, Sept. 28 -- JET CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2023-077477
Category (FI): H01L21/30,572@B,H01L21/304,643@A,H01L21/304,643@C,H01L21/304,651@B,H01L21/306@R,H10P50/60@R,H10P70/00,103@A,H10P70/00,103@C,H10P70/00,201@B,H10P76/00,572@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 9, 2023
Publication Date: Nov. 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....