Japan, Sept. 28 -- JET CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2023-077477

Category (FI): H01L21/30,572@B,H01L21/304,643@A,H01L21/304,643@C,H01L21/304,651@B,H01L21/306@R,H10P50/60@R,H10P70/00,103@A,H10P70/00,103@C,H10P70/00,201@B,H10P76/00,572@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: May 9, 2023

Publication Date: Nov. 21, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....