Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE

Japan, July 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-105697

Category (FI): H10P70/00,103@A,H01L21/304,643@A,H10P72/70,H01L21/68@N

Stage: PROBLEM TO BE SOLVED: To ensure that a process liquid bouncing back from substrate periphery does not adhere to the substrate during processing by the process liquid.SOLUTION: A substrate processing device 2 comprises: a support part 32 to which a substrate 9 is attached, with the substrate 9 being in a first support state of being supported horizontally, and that supports an attachment member 81 that expands to the surrounding of the substrate 9; a lifting part 33 that is locate...