Japan, May 21 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-151710
Category (FI): H10P72/30@A,H01L21/68@A,H01L21/304,648@A,H01L21/304,642@A,H01L21/304,651@B,H10P70/00,102@A,H10P70/00,108@A,H10P70/00,201@B,H10P70/00,201@N
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 22, 2022
Publication Date: April 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....