Japan, March 24 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2023-097153
Category (FI): H01L21/302,101@G,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: June 13, 2023
Publication Date: Dec. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....