Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, Sept. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-012453

Category (FI): H01L21/304,648@K,H01L21/304,643@A,H10P70/00,103@A,H10P70/00,108@K

Stage: PROBLEM TO BE SOLVED: To smoothly cool electrolytic sulfuric acid.SOLUTION: A substrate processing device includes: a substrate processing unit for processing a substrate using processing liquid containing electrolytic sulfuric acid; a supply tank for raising the temperature of the processing liquid and supplying the processing liquid to the substrate processing unit; a generation unit for generating the processing liquid with electroly...