Japan, Sept. 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-004629

Category (FI): H10P70/00,201@J,H10P70/00,108@G,H10P70/00,102@A,H01L21/304,642@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 16, 2023

Publication Date: July 26, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....