Japan, Aug. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-136751

Category (FI): H01L21/304,643@C,H10P70/00,103@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 30, 2022

Publication Date: March 13, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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