Japan, Aug. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-136752
Category (FI): H01L21/304,643@C,H10P70/00,103@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 30, 2022
Publication Date: March 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....