Japan, Aug. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-208024
Category (FI): H10P70/00,108@G,H01L21/304,648@L,H01L21/304,648@G,H01L21/304,643@A,H10P70/00,103@A,H10P70/00,108@L
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 26, 2022
Publication Date: July 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....