Japan, June 16 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-174942
Category (FI): H10P70/00,108@L,H01L21/304,648@L
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 31, 2022
Publication Date: May 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....