Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-040617

Category (FI): H01L21/31@C,C23C16/52,H10P14/60,101@C,H10P14/24,H01L21/68@A,H01L21/205,H10P72/30@A

Stage: Grant (IP right document published.)

Filing Date: March 15, 2022

Publication Date: Sept. 28, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....