Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE GRIPPING DEVICE

Japan, Sept. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE GRIPPING DEVICE.' Other related details are as follows:

Application Number: JP,2022-163724

Category (FI): H10P50/60@R,H01L21/306@R,H10P70/00,103@A,H10P70/00,108@Z,H10P72/70,H01L21/304,643@A,H01L21/304,648@Z,H01L21/68@N,H10P72/76

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 12, 2022

Publication Date: April 24, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....