Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE DETECTION METHOD

Japan, March 5 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE DETECTION METHOD.' Other related details are as follows:

Application Number: JP,2022-029251

Category (FI): H10P70/00,108@A,H10P70/00,108@G,H10P70/00,103@B,H01L21/304,648@G,H01L21/304,648@A,H01L21/304,643@B,H01L21/68@A,H10P72/30@A

Stage: PROBLEM TO BE SOLVED: To provide a technique that makes it possible to make detection with sufficient accuracy even in an environment where liquids are handled.SOLUTION: A substrate processing device includes a conveyance unit for conveying a substrate 9, a liquid processing unit for supplying the substrate 9 that is conveyed by the conveyance unit with liquid, and a sensor unit 4 f...