Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD

Japan, March 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-020358

Category (FI): H01L21/30,562,H01L21/30,564@C,H01L21/30,569@C,H01L21/304,643@A,H01L21/306@J,H10P50/60@J,H10P70/00,103@A,H10P70/00,108@G,H10P76/00,562,H10P76/00,564@C,H10P76/00,569@C,H10P95/00,102@A

Stage: Grant (IP right document published.)

Filing Date: Feb. 14, 2022

Publication Date: Aug. 24, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....