Japan, Sept. 9 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE.' Other related details are as follows:

Application Number: JP,2022-180196

Category (FI): H10P70/00,108@A,H10P70/00,104@Z,H01L21/304,648@A,H01L21/304,644@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 10, 2022

Publication Date: May 22, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....