Japan, Feb. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, ABNORMALITY DETECTION METHOD, AND ABNORMALITY DETECTION PROGRAM.' Other related details are as follows:
Application Number: JP,2022-048503
Category (FI): H01L21/304,648@Z,H01L21/306@J,H10P50/60@J,H10P70/00,108@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 24, 2022
Publication Date: April 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....