Japan, Feb. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, ABNORMALITY DETECTION METHOD, AND ABNORMALITY DETECTION PROGRAM.' Other related details are as follows:

Application Number: JP,2022-048503

Category (FI): H01L21/304,648@Z,H01L21/306@J,H10P50/60@J,H10P70/00,108@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 24, 2022

Publication Date: April 3, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....