Japan, Oct. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-077234
Category (FI): H10P14/60,101@B,H01L21/31@B,C23C16/46
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 9, 2023
Publication Date: Nov. 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....