Japan, Sept. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-058775
Category (FI): C23C16/46,H10P14/60,101@E,H10P14/24,H01L21/205,H01L21/31@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 31, 2023
Publication Date: Oct. 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....