Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-141077
Category (FI): H01L21/30,569@C,H10P76/00,569@C,G03F7/30,501
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 5, 2022
Publication Date: March 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....