Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, Aug. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-134816

Category (FI): H01L21/304,648@L,H01L21/304,643@A,H10P70/00,108@L,H01L21/68@N,H01L21/304,651@L,H10P72/70,H10P70/00,201@L,H10P70/00,103@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 26, 2022

Publication Date: March 7, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....