Japan, June 10 -- KIOXIA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-128898
Category (FI): H01L21/304,642@A,H10P70/00,102@F,H10P70/00,102@A,H10P50/68@B,H10P50/60@J,H01L21/304,642@F,H01L21/306@E,H01L21/306@J
Stage: Grant (IP right document published.)
Filing Date: Aug. 12, 2022
Publication Date: Oct. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....