Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, June 10 -- KIOXIA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-128898

Category (FI): H01L21/304,642@A,H10P70/00,102@F,H10P70/00,102@A,H10P50/68@B,H10P50/60@J,H01L21/304,642@F,H01L21/306@E,H01L21/306@J

Stage: Grant (IP right document published.)

Filing Date: Aug. 12, 2022

Publication Date: Oct. 2, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....