Japan, March 27 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-149719
Category (FI): H01L21/306@R,H01L21/304,651@M,H01L21/304,643@A,H01L21/304,651@L,H01L21/304,648@G,H01L21/304,651@B,H10P50/60@R,H10P70/00,103@A,H10P70/00,108@G,H10P70/00,201@B,H10P70/00,201@L,H10P70/00,201@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 21, 2022
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....