Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Nov. 10 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-181229

Category (FI): H10P70/00,108@K,H10P70/00,108@G,H10P70/00,103@A,H01L21/304,648@K,H01L21/304,648@G,H01L21/304,643@A

Stage: Grant (IP right document published.)

Filing Date: Oct. 20, 2023

Publication Date: May 2, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....