Japan, Sept. 3 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2024-073464
Category (FI): H10P70/00,201@J,H10P70/00,201@N,H10P70/00,108@G,H01L21/304,651@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 30, 2024
Publication Date: Nov. 12, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....