Japan, July 1 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-024167

Category (FI): H10P70/00,108@K,H10P70/00,103@A,B05D3/00@B,B05C11/00,B05C11/10,H01L21/304,643@A,H01L21/304,648@K

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 18, 2022

Publication Date: Oct. 4, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....