Japan, July 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2021-211504

Category (FI): H10P70/00,103@A,H10P70/00,108@L,H01L21/304,648@L,H01L21/304,643@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 24, 2021

Publication Date: July 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....