Japan, Sept. 9 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MOUNTING METHOD.' Other related details are as follows:
Application Number: JP,2022-205856
Category (FI): H01L21/68@N,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 22, 2022
Publication Date: July 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....