Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND MOUNTING TABLE.' Other related details are as follows:
Application Number: JP,2024-080749
Category (FI): H01L21/68@R,H05B3/74,H01L21/302,101@G,H10P72/72,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: May 17, 2024
Publication Date: Aug. 14, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....