Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PROGRAM

Japan, July 31 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PROGRAM.' Other related details are as follows:

Application Number: JP,2023-006849

Category (FI): H01L21/22,511@Q,H01L21/31@E,H10P95/90,101@S,H10P32/00,201@A,H01L21/31@B,H10P32/00,201@Q,H10P14/60,101@E,H10P14/60,101@B,H01L21/324@S,H01L21/22,511@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 19, 2023

Publication Date: July 31, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....