Japan, Aug. 24 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'SUBSTRATE LOCATION DETECTION AND ADJUSTMENT.' Other related details are as follows:
Application Number: JP,2025-008807
Category (FI): H10P50/24,H01L21/31@C,G01B11/02@H,H10P14/60,101@C,H10P50/20,101@B,H01L21/68@F,H01L21/68@R,H01L21/302,101@B,H10P72/72,H10P72/50@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 22, 2025
Publication Date: April 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....