Japan, Aug. 24 -- CANON INC has got intellectual property rights for 'SUBSTRATE HOLDING DEVICE, EXPOSURE DEVICE, AND MANUFACTURING METHOD FOR ARTICLE.' Other related details are as follows:
Application Number: JP,2022-084442
Category (FI): H10P76/00,600,H10P72/78,H01L21/30,502@D,H01L21/68@P
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 24, 2022
Publication Date: Dec. 6, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....