Japan Intellectual Property Rights: SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

Japan, June 16 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD.' Other related details are as follows:

Application Number: JP,2022-150757

Category (FI): H10P70/00,108@A,H01L21/304,648@G,H01L21/304,644@C,H01L21/304,644@E,H01L21/304,644@F,H01L21/304,648@A,H01L21/68@N,H01L21/304,643@A,H10P70/00,103@A,H10P70/00,104@C,H10P70/00,104@E,H10P70/00,104@F,H10P70/00,108@G,H10P72/70

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 21, 2022

Publication Date: April 2, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....